MALEKEE, Mojtaba; KAZEMPOOR, Mohammadreza. A Geometrically Self Compensated MEMS Capacitive Pressure Sensor with High Thermal Stability. Mechanical Technology and Engineering Insights, [S. l.], v. 1, n. 2, p. 122–131, 2024. DOI: 10.48313/mtei.v1i2.53. Disponível em: https://mtei.reapress.com/journal/article/view/53.. Acesso em: 22 jun. 2026.