A Geometrically Self Compensated MEMS Capacitive Pressure Sensor with High Thermal Stability

Authors

  • Mojtaba Malekee * Department of Mechanical Engineering, Faculty of Mechanical Engineering, University of Guilan, Rasht, Guilan, Iran.
  • Mohammadreza Kazempoor Department of Mechanical Engineering, Islamic Azad University, Siahkal Center, Siahkal, Guilan, Iran.

https://doi.org/10.48313/mtei.v1i2.53

Abstract

This paper proposes a highly sensitive capacitive pressure sensor for which a new thermal-compensation method has been developed. The new method uses a geometric approach to compensate for the decrease in Young's modulus with temperature. The method is based on connecting a mass spring with a larger spring that is connected to the anchor. Because of the difference in thermal expansion of the large spring and the small spring, the smaller spring would experience axial tensile forces, leading to an increase in its stiffness. Thus, the increase in stiffness of the smaller spring could compensate for the decrease in the spring constant of the larger spring because of the thermal dependence of the Young's modulus. The pressure error due to temperature changes in the compensated sensor is less than 33 Pa, demonstrating a remarkable improvement compared with previous literature reports. The sensor's occupied area is about 0.03288 mm², and its sensitivity is 290 ppm. Compared with state-of-the-art Micro-Electro-Mechanical Systems (MEMS) capacitive pressure sensors reported in the literature between 2015 and 2024, the Temperature Coefficient of Sensitivity (TCS) obtained with the proposed design achieves an extremely low value of 28.52 ppm/°C. 

Keywords:

Capacitive pressure sensor, Micro-electro-mechanical systems, Thermal compensation, Temperature dependence, Young's modulus, Geometrical compensation

References

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Published

2024-06-23

Issue

Vol. 1 No. 2 (2024): Mechanical Technology and Engineering Insights (MTEI)

Section

Articles

How to Cite

Malekee, M. ., & Kazempoor, M. . (2024). A Geometrically Self Compensated MEMS Capacitive Pressure Sensor with High Thermal Stability. Mechanical Technology and Engineering Insights, 1(2), 122-131. https://doi.org/10.48313/mtei.v1i2.53

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